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Physical Design and Mask Synthesis for Directed Self-Assembly Lithography

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Format
E-bog, ePub
Engelsk

Indgår i serie
Nanoscience and TEchnology

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Beskrivelse

This book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL). It covers the basic background of DSAL technology, physical design optimizations such as placement and redundant via insertion, and DSAL mask synthesis as well as its verification. Directed self-assembly lithography (DSAL) is a highly promising patterning solution in sub-7nm technology.

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Detaljer

SprogEngelsk
Udgivelsesdato21-03-2018
ISBN139783319762944
Forlag Springer International Publishing
FormatePub

Physical Design and Mask Synthesis for Directed Self-Assembly Lithography

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