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Physical Design and Mask Synthesis for Directed Self-Assembly Lithography

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Format
Bog, paperback
Engelsk

Indgår i serie
Nanoscience and TEchnology

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Beskrivelse

This book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL). It covers the basic background of DSAL technology, physical design optimizations such as placement and redundant via insertion, and DSAL mask synthesis as well as its verification. Directed self-assembly lithography (DSAL) is a highly promising patterning solution in sub-7nm technology.

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Detaljer

SprogEngelsk
Sidetal138
Udgivelsesdato08-02-2019
ISBN139783030094553
Forlag Springer Nature Switzerland AG
FormatPaperback

Størrelse og vægt

10 cm

15,5 cm

23,5 cm

Physical Design and Mask Synthesis for Directed Self-Assembly Lithography

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