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Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology

- Criticism of the Works of Novelists, Poets, Playwrights, Short-Story Writers, and Other Creative Writers Who Liv

Saburo Nonogaki
, Ueno Takumi
og Toshio Ito

Bog E-bog

Format
Bog, hardback
Engelsk

Indgår i serie
Plastics Engineering

Normalpris: kr. 164,95

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Forventet levering: 09-12-2024
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Beskrivelse

"Explores the science and technology of lithographic processes and resist materials and summarizes the most recent innovations in semiconductor manufacturing. Considers future trends in lithography and resist material technology. Reviews the interaction of light, electron beams, and X-rays with resist materials."

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Detaljer

SprogEngelsk
Sidetal336
Udgivelsesdato23-10-2013
ISBN139780824799519
Forlag Taylor & Francis Inc
Nummer i serien429
FormatHardback

Størrelse og vægt

Vægt589 g

Dybde2,7 cm

10 cm

15,2 cm

22,9 cm

Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology

- Criticism of the Works of Novelists, Poets, Playwrights, Short-Story Writers, and Other Creative Writers Who Liv

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