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Post-Processing Techniques for Integrated MEMS

  • Format
  • E-bog, PDF
  • 234 sider
E-bogen er DRM-beskyttet og kræver et særligt læseprogram

Beskrivelse

This groundbreaking resource presents cutting-edge post-processing techniques for the monolithic integration of MEMS. You learn how to select MEMS structural layers that can be processed on top of standard pre-fabricated electronics and will optimize the performance and reliability of the MEMS device. Supported with over 240 illustrations, the book details a modular integration process that won't modify the electronics fabrication process or impose any limitation for optimizing the physical properties of the MEMS structural layers.

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Detaljer
  • Sidetal234
  • Udgivelsesdato01-01-2005
  • ISBN139781580539029
  • Forlag Artech House
  • FormatPDF

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Machine Name: SAXO083