Plasma Deposited Thin Films

Sin Bonds Solar cells Process Temperature Deposition Gap Discharge Optical Glow discharge SBD Plasma deposition Substrate A. C. Adams Amorphous Silicon Films band tail Conduction Band Tail Dark Conductivity Carbon Films F. Jansen Etch Rate Frank Jansen dangling Dc Glow Discharge J. Mort Masataka Hirose John C. Angus Films Deposited Localized State Densities Masakiyo Matsumura NH Bond Glow Optical Gap Plasma CVD Glow Discharge Deposition Peter Koidl Plasma Deposition Process Rf Discharges Stoichiometric Silicon Nitride Throttle Valve Yukinori Kuwano Valence Band Tail Optical bandgap W. Fuhs Thin Film Deposition Process Stanley Domitz