Physics of Radiofrequency Capacitive Discharge

CVC RF field Distribution function BPI Ambipolar Diffusion Apply RF Voltage Beam Peak charge transport in electrodes diagnosing RFCD Contactless Method Discharge Gap External Electrodes Grounded Electrode discrete mechanism of transport of plasma electrons to electrodes High RF Voltage Electron Energy Distribution Function Interelectrode Distance near-electrode layers of a spatial discharge Gas Discharge Plasma Positive Half Period RFCD plasma RFCD High Energy Part RF Detection RF Discharge RF Voltage Stochastic Heating Negative Half Cycle Plasma Electrons Space Charge Layer