Beam Technologies for Integrated Processing

Beam technologies play an important role in microelectronic component fabrication and offer opportunities for application in other manufacturing schemes. Emerging beam technologies that incorporate potential for sensors, control, and information processing have created new opportunities for integrated processing of materials and components.This volume identifies various beam technologies and their applications in electronics and other potential manufacturing processes. Recommendations for research and development to enhance the understanding, capabilities, and applications of beam technologies are presented.Table of ContentsFRONT MATTER1 INTRODUCTION2 SUMMARY AND RECOMMENDATIONS3 BEAM TECHNOLOGIES4 BEAM APPLICATIONS IN MICROELECTRONICS5 BEAM APPLICATIONS IN ENGINEERED MATERIALS6 INTEGRATED PROCESSING7 REQUIREMENTS AND PROBLEMS FOR FURTHER INTEGRATIONAPPENDIX A: ACRONYMS AND ABBREVIATIONSAPPENDIX B: BIOGRAPHICAL SKETCHES OF COMMITTEE MEMBERS