MEMS: Micro-Electro-Mechanical Systems

MEMS, 2nd Edition, 2021, Colour Print

The field of Microsystems is a rapidly evolving topic. This is due to the increasing quantities of micro-sensors through their integration into smartphones and their manifold use in cars, as well as through the use of these sensors in new areas, such as medical technology. With the present textbook as a tool, the reader will be able to get to know the state of the art in this field, and to use successfully Microsystems in various applications.

The following textbook is based on the lecture module "Microsystems," which is held at University of Applied Sciences Bielefeld in the 6th semester of the bachelor course electrical engineering. The lecture module includes a practical course, which deals with the structure and the characterization of an acceleration sensor module. The instructions for this course are attached at the end of the book.

During the continuous use of the book for teaching at the University of Applied Sciences Bielefeld, a revision became necessary after 5 years. This is reflected first of all in a large number of new sensors from the various manufacturers and thus with significantly improved parameters. But also in terms of technology and design a lot has happened in recent years. In the 2nd edition of the book, therefore, all overviews were therefore updated and new trends added. In addition, the book has been expanded to include MEMS actuators and RF MEMS.

This book is translated from the original German "Mikrosysteme". The title of the book has been changed to "MEMS" for the 2nd edition, as this better describes the content of the book for the English-speaking world.